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| MEMS Sensor For MEMS Metrology Byungki Kim, H Ali Razavi Advisors: Dr. Levent Degertekin, Dr. Thomas R. Kurfess Development of a High-Resolution Position Sensor Using Radar MEMS Metrology MEMS and Matlab Metrology Process Modeling of Micro-Cutting Including Strain Gradient Effects A Nano Coordinate Machine for Optical Dimensional Metrology Near Dry Machining Prediction of Workpiece Location Due to Fixture-Induced Error Grinding Process Modeling and Cycle Design Semi-Empirical Modeling of White-Layer Formation Turning Hardened Steel Using Rotary Cutting Tools Predictive Modeling of Tool Wear in Hard Turning |